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NanoMap-D

 

Optical and Contact Profiler Combo System

 

 

 

알파스텝 상위버전(=전자동,3차원측정기능포함) 카타로그

 

알파스텝  상위버전 + SPM기능카타로그

 

 

접촉식 + 옵틱센서 겸용 버전 카타로그

 

 

 

실리콘밸리 소재 AEP사 웹사이트-->www.aeptechnology.com

 

접촉식 + Optical Profiler

     겸용  3차원 표면 가공성/거칠기 측정 검사기

   

Model Nano Map D-Combo

CONTACT PROFILER(접촉식)과 OPTICAL PROFILER(옵틱센터)가 각각 수직분해능 0.1nanometer~1micron의 분해능으로 측정하며,  아래 사양 선택적으로 시스템 구매 가능

-Contact Profiler에 의한 코팅막의 두께 단차 측정(알파스텝기능)

-옵틱센서 경우 수직측정범위가  30µm/100µm/5mm~10mm으로  

  측정범위가 광범위하며, 측정범위에 따라 측정   분해능이    Angstrome~Micron까지 달라져, 매우 다양한 샘플의 측정이 가능하다.

 

-Ellipsometer or Reflectometer를 선택하여  의한 코팅막의 두께 측정가능

-코팅 전후의 외형변화에 의한 STRESS측정

-표면의 거칠기(Roughness)/가공성(Waviness)/평탄도(Flatness)/비틀림   측정

-마모량,스크레치폭 깊이,부피,Radius,각도,등등 2차원,3차원 측정분석.

-Autofocusing으로 작업자가 측정을 편하게 한다.

-측정샘플에 따라 프로그래밍하여 빠르게 자동으로 auto positioing하여

  신속하고 편한 측정이 가능하다.

-표면및 MEMS/NEMS등 초소형부품의 3차원 측정분석.

-상용화되어 있는 SPIP 분석 소프트웨어를 선택하여  최고의 측정 분석

   기술 적용 가능.  (http://www.imagemet.com/)

      

 

아래에 상세 사양 검토 가능 합니다.

 

간편한 측정소프트웨어

NanoMap-D 전체시스템

왼쪽-옵틱 WLI센서,  오른쪽-Contact Profiler(선택가능)

Contact Profiler Tip:

0.1~100mg 범위에서  측정 Tip의 하중을 소프트웨어서 자동 Feedback제어 가능, 표면의 상흔을 내지않을  수 있다

Features

l Seamless integration of conventional contact profile meter and scanning probe microscope ( SPM) technology

l Dual mode operation (tip scan and stage scan) optimized for small area 3D mapping as well as longrange profiling

l Precision piezo driven tip scan mode provides 3D scan range from

10um x 10um up to 500um x 500um, while the high grade optical

reference flat enables long range scan up to 50mm

l Integrated color optical camera for direct sample viewing during

scanning

l Wide measurement dynamic range (up to 500um) as a result of the

dual optical sensors

l Constant contact force settable by software

l Integrated vibration isolation platform for ultimate noise performance

l Simple 2-key operation with user friendly software interface

 

 

Applications

 

l 3D surface profiling and roughness measurement from finely polished optical surfaces

   to coarsely machined parts

l Thin and thick film step heights measurement

l Quantify scratch and dig features, wear depth, width and volume

l Dimensional analysis and surface texture characterization

l Flatness or curvature measurement

l 2D thin film stress measurement

l Micro electronics surface analysis and MEMS device surface profilingSurface defect inspection

 

cility and Environment

l Humidity: 10-80%, relative humidity, non-condensing

l Temperature: 65-85 Fahrenheit (ΔT < 1 degree/hour)

l Power Requirements: 110/240 VAC, 50/60 Hz

 

Technical specifications of Optical Profiler(옵틱센서)

           

Performance(White Light Interferrometer)

Contents
Specification

RMS Z scan repeatability (Phase-Shift mode)

 

0.1nm

RMS Z scan repeatability (Standard mode)

 

1nm

XY surface sampling

            

 

 

0.11 to 8.8um

Z working distance

 

 

 

up to 10mm

Z scan speed

 

 

 

up to 7.2um/sec

Reflectivity

                           

 

 

 

1 to 100%

Digitized resolution

 

 

 

1024 x 1024pixels

XY stage movement range

 

 

100x100mm

Tip-tilt range

 

 

 

 

+/-7degrees

Manual rotation stage range

 

 

360degrees

Maximum slope

 

 

 

40 to 3.2degrees

Calibrated accuracy

 

 

 

0.1%

    ***수직 측정범위 : 30µm/100µm/5mm~10mm(측정범위에 따라, 수직측정 분해능 0.1nm/1nm/1micron

                                                                 으로 달라짐,세가지 측정범위의 센서능력)

Magnification

Objective Magnification

50x

10x

5x

Numerical aperture

0.55

0.30

0.13

XY measurement area (μm)

102.4 x 102.4

512x512

1024x1024

XY spatial sampling (μm)

0.1

0.5

1

XY optical resolution @550nm (μm)

0.50

0.92

2.12

Z working distance (mm)

3.4

7.4

9.3

Depth of focus @550nm (μm)

1.16

3.89

20.72

Degrees of maximum surface Slope

22.6

4.8

2.4

 

 

 

 

 

 

 

 

Technical specifications of Contact Profiler(접촉식센서)

Performance(Contact Profiler)

Category

Item

Specification

General

Software controllable stylus force range

0.1 to 100mg

Stylus tip radius standard

5um

Stylus tip radius options

0.1-0.8, 2, 12.5, 25um

Full time color CCD camera with bright and dark field illumination(샘플표면 조망용 카메라)

  FOV:1.5 x 1.5mm(512 x 512 pixels), 배율 60~120X

Tip Scan

(Piezo Scanner)

상부 stage

---->SPM과 유사한 측정 정밀도

Z scan repeatability

0.8nm

Z scan resolution

0.1nm

Z scan fine range

5um

Z scan coarse range

500um

XY scan resolution

0.1um

XY scan position repeatability

0.2um

XY scan speed

10 to 50um/sec

XY scan range

500um x 500um

Data point per scan

100 to 1000points

Glass Stage Scan

하부 stage

--->알파스텝중 최상위 버전인 전자동 Stage 이동 측정과 3차원측정 기능.

XY sample area 

100mm x 100mm

XY stage movement range 

100mm x 100mm

XY stage position repeatability 

5um

XY scan range

50mm x 50mm

XY scan speed 

0.1 to 5mm/sec

Z stage movement range 

55mm

Z scan fine range

5um

Z scan coarse range

500um

Maximum sample height

50mm

Manual rotation stage range

360degrees

Manual tilt stage range

+/-7degrees

System

Step height standards

100um

Computer

Pentium IV based PC

with USB2.0 connections

Operating System

Window XP

System power requirement

90-240V AC 350Watt

Gross Weight and Dimensions

BOX1: Wood 30”W x 40”L x 20”H, 150kg

BOX2: Cardboard 18”W x 24”L x 18”H, 30kg

Facility and Environment

l       Humidity: 10-80%, relative humidity, non-condensing

l       Temperature: 65-85 Fahrenheit (ΔT < 1 degree/hour)

l      Power Requirements: 110/240 VAC, 50/60 Hz

 

 

                     상세한 사양과 정보를 원하시면 아래 연락처 한미산업으로 전화 주시기 바랍니다.

                                           다양한  사이즈와 분해능의 3차원 측정기는 여기로--->

 

 한미산업 

전화 :  02 - 3411- 0173    팩스 :  02 - 3411 - 0178 

sales@gohanmi.com

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