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¸¸´É ¸¶Âû¸¶¸ðÀ±È° ½ÃÇè±â

 

Nano~Micro~Macro Tribology(¸¶Âû¸¶¸ðÀ±È°) ½ÃÇèºÐ¼®±â

 

¿ÞÂÊ ºê·çÄ¿»ç ·Î°í Ŭ¸¯ ÇϽøéÀº BRUKER»ç ȨÆäÀÌÁö ¸µÅ© µË´Ï´Ù.

          New Model  UMT-Tribolab 

 

´Ù¾çÇÑ 2Ãà ¼öÁ÷ÇÏÁßÁ¦¾î & ¸¶Âû·Â ÃøÁ¤¼¾¼­·Î ÃÖ´ë 2,000N~1mN ¼öÁ÷ÇÏÁß Á¦¾î ¼¾¼­¸¦ ¼±ÅÃÇÒ ¼ö ÀÖ½À´Ï´Ù.

 

 

   aniblue12_next.gifÀ§ ´Ù¾çÇÑ ¹üÀ§ÀÇ ³ª³ë~¸¶ÀÌÅ©·Î~¸ÅÅ©·Î ÇÏÁßÁ¦¾î ¹× ¸¶Âû·Â  ÃøÁ¤ 2Ãà ¼¾¼­¸¦   ÇÑ ´ëÀÇ ½ÃÇè±â¿¡¼­    ÇÊ¿äÇÑ ¹üÀ§¸¦ ¼±ÅÃÇÏ¿©   

³ª³ë ~¸¶ÀÌÅ©·Î ~¸ÅÅ©·Î °íÇÏÁßÀÇ  ¸¶Âû¸¶¸ðÀ±È° ½ÃÇè°ú ½ºÅ©·¡Ä¡ ½ÃÇèÀ» ÇÑ ´ë¿¡¼­ ÇÒ ¼ö Àִ ÷´Ü ±â¼ú ÀÔ´Ï´Ù.

¿Õº¹Çü ¸¶Âû¿îµ¿ÀÇ ´Ù¾çÇÑ ¿îµ¿

BLOCK ON RING ´Ù¾çÇÑ ¸¶Âû¿îµ¿

   

 

 

ȸÀüÇü ÇÉ-¿Â-µð½ºÅ© ¸éÁ¢ÃË, º¼-¿Â-µð½ºÅ© Á¡Á¢ÃË,

µð½ºÅ©-¿Â-µð½ºÅ© Å«¸éÁ¢ÃË, »ç±¸½Ä Æ÷º¼½ÃÇèÀÇ ´Ù¾çÇÑ ¸¶Âû¿îµ¿

 

 

 

 

Àú¼Ó ¿Õº¹Çü°ú ¿­½ÊÀÚÇü ¸¶Âû¿îµ¿ °¡´É

 

Block on Ring Test ½ÃÇèÀåÄ¡

 

 

 

ºí·Ï ¿Â ¸µ Å×½ºÆ®¿¡¼­ ºí·ÏÀº »ó´Ü¿¡¼­ ¼öÁ÷ ÇÏÁß Àû¿ëÀÌ µÇ°í ȸÀüÇÏ´Â ÇϺΠ¸µ¿¡ ´ëÇØ °¡¾ÐµË´Ï´Ù. ºí·Ï Ȧ´õ´Â ºí·ÏÀ» °íÁ¤ÇÏ´Â µ¥ »ç¿ëµË´Ï´Ù. ¼öÆòÃàÀ» Áß½ÉÀ¸·Î  ȸÀüÇÏ´Â ¾Æ¹ö(arbor)¿¡ Ç¥ÁØ ¸µÀ» ¼³Ä¡Çϰí,  Fx ¸¶Âû·Â  ¹×  Fz ¼öÁ÷ÇÏÁß   µ¥ÀÌÅ͸¦ ÃøÁ¤ÇÏ¿© COF¸¦ ¾ò½À´Ï´Ù. À§¿Í °°ÀÌ 3Â÷¿ø Çö¹Ì°æÀ¸·Î ºí·ÏÀÇ ¸¶¸ð ÈçÀûÀ» ÃøÁ¤ÇÒ ¼ö ÀÖ½À´Ï´Ù.

 

 

Pin-on-Vee ºí·Ï ½ÃÇèÀº  ÇÉÀ» ȸÀü½Ã۰í ÇÏÁßÀ» °¡ÇÏ¿© VÀÚÇü Ȩ¿¡ ´ëÇØ ÈûÀ» °¡ÇÏ´Â ¹æ½ÄÀ¸·Î ¼öÇàµË´Ï´Ù.

ÀÌ ¼³Á¤Àº ¿©·¯ ASTM Ç¥ÁØ Å×½ºÆ®¸¦ ¼öÇàÇÏ´Â µ¥ »ç¿ëÇÒ ¼ö ÀÖ½À´Ï´Ù.

ASTM D3233  Pin and Vee Å×½ºÆ®´Â 1,174N ÇÏÁß ¹× 290rpm¿¡¼­ 5ºÐ µ¿¾È ±æµéÀÌ´Â °ÍÀ¸·Î ½ÃÀ۵˴ϴÙ. ±×·± ´ÙÀ½ ºÎÇϸ¦ 1,832NÀ¸·Î ¿Ã¸®°í Å×½ºÆ®¸¦ 290rpm¿¡¼­ 1ºÐ µ¿¾È ½ÇÇàÇÕ´Ï´Ù. ºÎÇϸ¦ 1ºÐ µ¿¾È 2,828N, 1ºÐ µ¿¾È 3,824NÀ¸·Î ¿Ã¸° ´ÙÀ½ À±È°À¯ÀÇ ±â´ÉÀÌ ±Þ°ÝÈ÷ ¶³¾îÁú  ¶§±îÁö À¯»çÇÏ°Ô ÁøÇàÇÕ´Ï´Ù. À±È°±â´ÉÀÇ ½ÇÆÐ´Â ¸¶Âû·ÂÀÇ ±Þ°ÝÇÑ Áõ°¡·Î °¨ÁöµË´Ï´Ù.

´Ù¾çÇÑ ¸¶Âû¸¶¸ðÀ±È° ½ÃÇèÀåÄ¡¸¦ ºü¸£°í °£´ÜÇÏ°Ô ¼³Ä¡ ±³Ã¼ ÇÏ¿©,

¿Õº¹Çü, ȸÀü½Ä Çɿµð½ºÅ©, »ç±¸½Ä 4BALL, ºí·Ï¿Â¸µ, Pin and Vee, Tapping Torque Test, Stribeck Curve ½ÃÇèÀåÄ¡ µî ´Ù¾çÇÑ ¸¶Âû¸¶¸ðÀ±È° ½ÃÇèÀ» ¿Ïº®ÇÏ°Ô ¼öÇà ÇÕ´Ï´Ù.

 

Ãß°¡·Î, ½ºÅ©·¡Ä¡ ½ÃÇè »Ó ¾Æ´Ï¶ó, 1,000¡É °í¿Â°æµµ°è, CREEP, STIFFNESS, ELASTICITY µîÀÇ ¹°¼º ½ÃÇèµµ °¡´É ÇÕ´Ï´Ù.    

 

 

 

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½ºÅ©·¹Ä¡ ½ÃÇè½Ã Á¤·®Àû ºÐ¼®À» À§ÇØ ´Ù¾çÇÑ ÃøÁ¤¼¾¼­°¡ Àû¿ëµÈ´Ù.

Ư¼öÀ½Çâ¼¾¼­,¸¶Âû°è¼ö¼¾¼­,Ç¥¸éÀúÇ×,Àü±âÀúÇ×,

ÆÄ³ë¶ó¹Í À̹ÌÁö ÃøÁ¤ Çö¹Ì°æ, µî

 

»ùÇÃÀÇ ¼ºÁú¿¡ µû¶ó ´Ù¾çÇÑ ½ºÅ©·¡Ä¡ TipÀÌ °ø±ÞµÈ´Ù.

DLC ÄÚÆÃµÈ ½ÃÆíÀÇ ½ºÅ©·¹Ä¡ ½ÃÇèÀ» À§ÇÏ¿© »óÈçÃøÁ¤ Çö¹Ì°æ,

ÃøÁ¤ ¼¾¼­, Tipµî ¼¼ÆÃ Àü°æ

 

Panoramic Image ºÐ¼®±â¹ý--->

 

 ½ºÅ©·¹Ä¡ ½ÃÇè½Ã, ¼ö½ÊÀåÀÇ ½ºÅ©·¡Ä¡ »óÈç À̹ÌÁö¸¦ ÃøÁ¤ÇÏ¿©, ÇѰ³ÀÇ »çÁøÀ¸·Î À̹ÌÁöÈ­ÇÏ¿©(Panoramic±â¹ý) »óÈçÀÇ À̹ÌÁö¿Í ÃøÁ¤¼¾¼­   (¸¶Âû°è¼ö,À½Çâ¼¾¼­,     ECRÇ¥¸éÀúÇ×ÃøÁ¤¼¾¼­)ÀÇ ¼öÄ¡µîÀ» ÀÌ¿ëÇÏ¿© ±×¶óÇÁ¿¡¼­ µ¿±âÈ­ÇÑ Á¤·®ºÐ¼®±â¹ý

          ÃÖ÷´Ü±â¼úÀÇ  BRUKER»ç!!!

¸ðµ¨ UMT-Tribolab  (Universal Mechanical & Tribology Tester)   

½Ç¸®Äܹ븮 ÃÖ÷´Ü Micro/Nano Tribology ±â¼ú, ÀÚü ¼¾¼­±â¼ú·Î ±âÁ¸ÀÇ Æ®¶óÀ̺¼·ÎÁö¿Í

Nano ¹°¼º ½ÃÇè¿¡ ´ëÇÑ °³³äÀ» Çõ½ÅÇÏ¿© ±¤¹üÀ§ÇÑ ½ÃÇè ±¸Çö!

                                                         

1.ÃøÁ¤¿ä¼Ò

 

 

 ¸¶Âû¸¶¸ðÀ±È°ÃøÁ¤¿ä¼Ò : -´Ù¾çÇÑ ÀçÁúÇ¥¸éÀÇ ¸¶Âû¸¶¸ðÀ±È°(TRIBOLOGY)Ư¼º ¹× ÄÚÆÃÆ¯¼º ÃøÁ¤

                         -Àü¹®ÀûÀΠȸÀü½Ä Pin on disc(0.1~5,000rpm)

                         -¿Õº¹µ¿½Ä¸¶Âû¸¶¸ð(50Hz)/Block on Ring/Fourball

                         -±¤µð½ºÅ©µîÀÇ TribologyƯ¼º                            

                          -Hard DiskÇ¥¸éÀÇ ¸¶Âû°è¼ö¿Í ¿­Æ¯¼º ½ÃÇè

                         -CMP TEST

 

 ½ºÅ©·¡Ä¡ Á¢Âø°­µµ ÃøÁ¤¿ä¼Ò : -Scratch Hardness Test

                                            -Scratch Adhesion Test(Áö±×Àç±×, 3D¼¾¼­·Î Çõ½ÅÀûÀÎ ±â¼ú °³¹ß)

                               -Delamination/Ahdesion

                               -Friction/Wear/Deformation

 

 ¹°¼º ÃøÁ¤¿ä¼Ò : -1,000¡É ROCKWELL HARDNESS

                  -Micro Hardness

                  -Creep/Stiffness/Plastic Deformation,  Elastic Modulus/Youngs Modulus

                  -Tensile/Compression

                  -Penetration/Piercing Resistance.

                  -Sharpness

                                                                       ½ÃÇèÀåÄ¡ ¸ðµâ ºü¸¥ ±³Ã¼ 30~40ÃÊ À̳»     

 

 Optical Microscope ¿É¼Ç ;

 

       ´Ù¾çÇÑ Ä¡±¸¿Í ¼¾¼­·Î ÇÑ °èÃø±â³»¿¡¼­ À§¿Í °°Àº  Nano~Micro~Macro´ÜÀ§ÀÇ

       ¹°¼º¹× Ç¥¸é,°è¸éƯ¼ºÀ» ¿Ïº®È÷ ºÐ¼®ÇÒ ¼ö ÀÖ´Â °í±â´É Àåºñ ÀÓ.

 

 

Ư¼ö½ÃÇèȯ°æ Á¦¾î

   Scratch, Tribology ½ÃÇè½Ã(Ÿ»çÀÇ ½ÃÇè±â´Â ¾Æ·¡ ½ÃÇèȯ°æ Á¦¾î°¡ ´ëºÎºÐ ºÒ°¡´É ÇÕ´Ï´Ù):

    ¿ÂµµÁ¶Àý:  »ó¿Â to 1,000¡É  °¡¿­    or     »ó¿Â to -35¡É ³Ã°¢

    ½ÀµµÁ¶Àý :  Humidity Control from 0 to 100% RH, with or without temperature control,

    È­ÇÐÀûºÎ½Ä½ÃÇè: Corrosive Electro-Chemical Chamber with an integrated potentiostat/galvanostat

    Áø°øÃ¨¹ö:- 10-6 Torr (10-9 bar, 0.1 mPa) standard, 10-7 Torr (10-10 bar, 0.01 mPa) optional
    Inert gases option

 

 

                                                                                 Scratch Àü¿ë½ÃÇè±â ÀÏÁ¦

2.Ư¡

 

   A. ADHESION(Á¢Âø·Â)

   ¼¼°èÃÖÃÊ·Î ÇÑ ½ÃÇè±â¿¡¼­ ÄÚÆÃÀÇ Adhesion(Á¢Âø·Â)À» ½ÃÇèÇÏ´Â 5°¡Áö ¹æ½ÄÀÎ

   Tape test/Stud-Pull test/Scratch test/indentation test/¸éµµ³¯¿¡ ÀÇÇÑ ¹æ½ÄµîÀ» ¼öÇàÇÏ¿©,

   ¹Ú¸·°ú Èĸ·ÀÇ Á¢Âø·ÂÀ» Á¤È®ÇÏ°í ´Ù¾çÇÏ°Ô ÃøÁ¤ÇÑ´Ù.

   ¶ÇÇÑ, °í±Þ ÆòÆÇ À¯¸®/½ºÅ×Àη¹½º ½ºÆ¿ ½ÃÆ® ¹× Á¢ÂøÁ¦ÀÇ »ó´ë¹°Áú¿¡ ´ëÇÑ Á¢Âø·Â ½ÇÇèµµ ´Ù¾çÇÑ   

    Áö±×¿¡ ÀÇÇØ °¡´É.

   ½Ã½ºÅÛÀÇ ÇÏÁßÁ¦¾î ¹æ½ÄÀÌ Closed Loop Servo Control SystemÀ¸·Î

   ÇÏÁß Àû¿ë½Ã,  ½ÃÆí°ú ÇØ´çÇ¥¸é¿¡¼­ ¹ß»ýµÇ´Â ½ÇÁ¦ ÇÏÁßÀ»

 Á¤È®È÷ Àоî ÁÖ¸ç, ´Ù½Ã Closed LoopÀ¸·Î Á¦¾îÇÏ°Ô µÇ¾î, ½ÇÁ¦ ½ÃÆíÀÌ SoftȤÀº

 Hard ÄÚÆÃ,  º¼·Ï/¿À¸ñ/´Ù¾çÇÑ ÇüÅÂ¿Í »ó°ü¾øÀÌ ¿øÇÏ´Â ÇÏÁßÀû¿ëÀ» ¹þ¾î³ª·Á°í ÇÒ

 °æ¿ì ÀÌ Á¦¾î½Ã½ºÅÛÀº ½ÅÈ£¸¦ LoopÀ¸·Î ¿¬¼ÓÀûÀ¸·Î Á¤È®È÷ ÇÏÁßÁ¦¾î¸¦ ÇÏ°Ô µÇ¾î,

   Constant Load/Progressive load ¸ðµÎ Á¤È®È÷ ½ÃÆí¿¡ ÇÏÁßÁ¦¾î°¡ ÀÌ·ç¾îÁö°Ô µË´Ï´Ù.

   ´ëºÎºÐÀÇ À¯¸í Ÿ»ç ÀåºñµéÀº ÇÏÁßÁ¦¾î°¡ ½ÇÁ¦ Á¤È®ÇÏÁö ¾ÊÀº °æ¿ì°¡ ¸¹½À´Ï´Ù.

   º¸ÅëÀº ÀϹæÀûÀÎ ÇÏÁßÀû¿ë°ú OutputÃøÁ¤¹æ½ÄÀÔ´Ï´Ù

   2011³â ¾ÖÇðú ÀÎÅÚ ¸ðµç Çù·Â»ç¿¡¼­ Áö±×Àç±× ¹æ½Ä + 3D(¼öÁ÷ÇÏÁßÁ¦¾î/XYº¤ÅÍÇÕ ¸¶Âû·Â ÃøÁ¤¼¾¼­) ±â¼ú µµÀÔÇÏ¿© »ç¿ë!

 

   B. Scratch  (½ºÅ©·¹Ä¡¸¦ ÅëÇÏ¿© ¹Ú¸·ÄÚÆÃÀÇ  ¹°¼º °æµµ¿Í ÄÚÆÃ¹ÐÂø·Â Æò°¡)

   Maker¿¡¼­ Ư¼ö ¼³°èÇÑ Diamond Tip»Ó ¾Æ´Ï¶ó,Blade¸¦ ÀÌ¿ëÇÏ¿© ÇÏÁßÀ» Áõ°¡½Ã۸ç,

   ¹Ú¸· ¶Ç´Â Èĸ·À» ½ºÅ©·¹Ä¡ÇÏ¿© ÄÚÆÃÀ» ÆÄ±«ÇÑ blade°¡ Substrate¸¦ °¨ÁöÇÒ¶§ Àü±âÀúÇ×/Ç¥¸éÀúÇ×

   ¹× °íÀ½Çâ ŽÁö¿¡ ÀÇÇÏ¿©, Critical load¸¦ ºÐ¼®ÇÔ. ÆÄ³ë¶óƽ À̹ÌÁö ºÐ¼®¿ë µðÁöÅÐÄ«¸Þ¶ó¹× Çö¹Ì°æ ¿É¼Ç.

   ÀÌ Àåºñ´Â ¼ÒÇÁÆ® ÄÚÆÃÀç·á ȤÀº Ç¥¸éÀÌ º¼·Ï/¿À¸ñÇÑ Æ¯ÀÌÇÑ Çü»óÀÇ Ç¥¸éÀçÁúÀÇ °æ¿ì

   ±âÁ¸ÀÇ À¯¸íµµ°¡ ³ôÀº ½ºÅ©·¹Ä¡ ½ÃÇè±âµµ µ¥ÀÌÅͰ¡ ¸Å¿ì ºÒ¾ÈÁ¤ÇØÁö³ª, Ư¼öÇÑ ÇÏÁßÁ¦¾î

   ½Ã½ºÅÛÀ» µµÀÔÇÏ¿©, ÀÌ·¯ÇÑ ´ÜÁ¡À» ¿ÏÀüÈ÷ Á¦°ÅÇÑ ÃֽŠÀåºñÀÓ.

   ASTM G-171(SCRATCH HARDNESS OF MATERIALS USING A DIAMOND STYLUS)·Î 100micron~1nano meter µÎ²²ÀÇ Ãʹڸ·

   Çʸ§À̳ª ÄÚÆÃÀÇ °æµµÄ¡ ÃøÁ¤

 

 

      C. Micro Hardness/Micro Indenting(¸¶ÀÌÅ©·Î °æµµ/¹°¼º)

   ´Ù¾çÇÑ ¾ÐÀÚ¸¦ 1OOkg~0.01gram(ºÐÇØ´É:0.0005gf/ Accuracy:0.001gf)ÀÇ ¼¾¼­¸¦ ¼±Á¤ÇÏ¿© ÇÏÁßÀ»

   Á¤±³È÷ Á¶Á¤ÇÏ¿©,    

   Indentingº¯À§ 30nmºÐÇØ´ÉÀ¸·Î ÃøÁ¤¹üÀ§ 30nm~micron meter~milli meter ÃøÁ¤ºÐ¼®.´Ù¾çÇÑ ¹°¼ºÄ¡ÀÎ

   Creep/Relaxation/Youngs Modulusµî

   ÃøÁ¤ ¹×  ÇÑ ½ÃÆí¿¡¼­ ¼ö½Ê°³ÀÇ ¾ÐÁ¡À» Âï¾î ½ÃÆíÀÇ ¹°¼ºÄ¡ÀÇ ±ÕÀϼº ºÐ¼®.   

                                                                                                       ¸¶ÀÌÅ©·Î Àε§ÅÍ  »çÀÌÆ®

                                                                                                                                                      

                                

     E. Friction/Wear (¸¶Âû/¸¶¸ð/À±È°/³»±¸¼º ¼ö¸íÆò°¡)

   Áö±×¿Í ÀûÁ¤¼¾¼­ÀÇ º¯Çü¿¡ µû¶ó, ÇÑ ½ÃÇè±â¿¡¼­ 0.01gram-200kgÇÏÁßÀ» Á¤±³È÷ Á¶Á¤°¡´ÉÇϸç,

   Çɿµð½ºÅ©,¿Õº¹µ¿½Ä,Block on Ring,Four BallµîÀÇ ½ÇÇèÀ» °í¿Â,Áø°ø,ºÎ½Ä¼º °³½º¹× ´Ù¾ç

   ÇÑ ºÐÀ§±â¸¦ Á¶¼ºÇÏ¿© ½ÇÇèÀ» Çϴ ȹ±âÀûÀÎ ÀåºñÀÓ.

   ¶ÇÇÑ Çϵåµð½ºÅ© ¹× DVD/CD-R/CD-RW µîÀÇ ÄÚÆÃ ¹× ¹ÝµµÃ¼ WAFERÀÇ °øÁ¤¿¡¼­ Ç¥¸éÀÇ ¿­º¯Çü

   ¹× ¸¶Âû,¸¶¸ðÀ²,À±È°,¿¬¸¶Æ¯¼ºµîÀ» Á¤±³È÷ ºÐ¼®ÇÔ.

                                                             ¿¬±¸¿ë ¹×  Ç°Áú°ü¸®ÀÇ ´Ù¾çÇÑ  TRIBOLOGY  Àåºñ  ¸®½ºÆ® 

                                                   

                                                               

 

   F. Creep(ÀÏÁ¤ÇÑ ÇÏÁß¿¡ ´ëÇÑ,±Ý¼ÓÀÇ º¯ÇüÀ²)  

   Åº¼º¹°ÁúÀ̳ª ƯÁ¤ Àç·á¹× ±â±¸¸¦ ÀÏÁ¤ÇÑ ÇÏÁßÀ» °¡ÇÏ¿© ´ë»ó¹°ÁúÀÇ º¯ÇüÀ²

   À» ÃøÁ¤Çϸç, ¹Ý´ëÀÇ ¼ºÁúÀÎ ÀÏÁ¤ÇÑ º¯Çü¿¡ ´ëÇÑ ÇÏÁßÀÇ º¯È­Ä¡ÀÎ Relaxation¿¡ ´ëÇÑ

   ÃøÁ¤.

 

   G. Tensile( ÀÎÀå, ¾ÐÃà)

    Video/Audio/Magnetic Tape¸¦ ÀÎÀå½ÃÇè±â¿Í °°ÀÌ Àû¿ëµÈ ÀÎÀå·Â¿¡ ´ëÇÑ Åº¼ºÀ² ¹×

    º¯Çü·üÀ» ºÐ¼®.

    CANTILEVER¿Í °°Àº MEMSÀÇ ±â°èÀûƯ¼º(Elastic Modulus/Internal Stress/Stiffness) ¹×

    Ç¥¸éƯ¼º ½ÇÇè¿¡ ÀûÇÕ.                                                     ´Ù±â´É  Creep ½ÃÇè±â

                                                                                                                                    ´Ù±â´É 1,000¡É °í¿Â ·ÎÅ©À£°æµµ±â

                                                                                        

3.Àû¿ë¹üÀ§

 

A.¹Ú¸· Èĸ· µî ´Ù¾çÇÑ ÄÚÆÃ¹× ÀçÁúÀÇ Á¢Âø·Â Æò°¡, Delamination, ½ºÅ©·¹Ä¡ ÀúÇ×¼º/°æµµÆ¯¼º Æò°¡

B.LCD/PDP DisplayÀÇ ITO ÄÚÆÃ°ú °°Àº Ãʹڸ·ÀÇ Á¢ÂøÆ¯¼º Æò°¡.

C.Ãʹڸ· µî ³ª³ë ¹°¼º Æò°¡(½ºÅ©·¡Ä¡¿Í Indenting¹æ½Ä)

D.MEMS(Micro Electronic Machine SystemÀÇ ¹°¼º) -Cantilevar¿Í °°Àº MEMS±¸Á¶¹°ÀÇ Young's Modulus, Internal Stressµî ÃøÁ¤

C.±¤µð½ºÅ©(DVD,CD-R/RW),¸¶±×³×ƽ Çìµå/¸¶±×Åׯ½ Å×ÀÌÇÁ,MediaÀÇ ¹°¼º ¹× Ç¥¸é ¸¶Âû¸¶¸ðƯ¼º
D.Fastner, Paper

E.ÀÇ·á¿ë ¼ö¼ú tool, needle,suture,ballon

F.À¯¸®, ¾È°æ·»Áî, Á¾ÀÌÀÇ ÄÚÆÃÁ¢Âø·Â Æò°¡,

G.À±È°À¯ Ư¼º

H.ÄÚÆÃÀÇ °üÅëÀ²,

I.¸éµµ³¯µîÀÇ Sharpness ¹× ³»¸¶¸ðµµ Æò°¡.

H.¹ÝµµÃ¼ ¿þÀÌÆÛ ÄÚÆÃ ±â¼ú ¹× CMP TESTER

         -º°µµ·Î CMP Tester ¹× Control Device¸¦ °ø±Þ(»ç¿ëÀÚ :Applied Material, Speed Fam/IPEC,

                                                                           Rodel,IBM..µî)

       

                                                                                       CMP °øÁ¤ ÃÖÀûÈ­ ½ÃÇè±â

 

4.¼¼ºÎ »ç¾ç

 

´Ù¾çÇÑ ¹üÀ§ÀÇ ÃÊÁ¤¹Ð¼¾¼­¸¦ Çʿ信 µû¶ó ÃßÈÄ ±¸¸Å Àû¿ë °¡´É.

-ÃÖ¼Ò ¼öÁ÷ ÇÏÁßÁ¦¾î : 0.01g-1gf(Á¦¾î¹× ÃøÁ¤)

-MICRO Indenter ¿ë ÃÖ¼Ò¼öÁ÷ÇÏÁßÁ¦¾î : 5 x 10-7gramf

-ÃÖ¼Ò ¼öÁ÷ÇÏÁß ºÐÇØ´É  : 0.0005gf

-ÃÖ´ëÀû¿ëÇÏÁß : Over 200kg(Áö±×º¯È¯) ±¤¹üÀ§ÇÑ ¿ëµµ Àû¿ë.

-¼öÁ÷ º¯À§ ÃÖ¼Ò ºÐÇØ´É:   30nm, 0.5micron meter µÎ°¡Áö

-MICRO Indenter¿ë ¼öÁ÷º¯À§ ºÐÇØ´É: 0.4nano meter

-ȸÀü½Ä ¸¶ÂûȸÀü ¼Óµµ : 0.001~12,000rpm

-¿Õº¹µ¿½Ä Ãִ븶Âû¼Óµµ: 50Hz

-X,Y,ZÃà ¿îµ¿ ¹× ¼ÓµµÁ¶Àý.

-Àڻ簳¹ß¼¾¼­ : 2 Axis Friction/Load ¼¾¼­

                Strain gauge sensor 

                Capacitance wear/deformation sensor

                Electrical Resistance Sensor(ECR)/ESR

                High Frequency Acoustic Sensor

                ¸¸´É¿¡ °¡±î¿î ½ÃÇ豸ÇöÀ» À§ÇÑ ´Ù¾çÇÑ Áö±×

 

ÀÌ °èÃø±âÀÇ Çõ½ÅÀû Á¦¾î ¹× ¼¾¼­ ¿ø¸®¸¦ ¾Ë°í½ÍÀ¸½Ã¸é ¿¬¶ôÁֽñ⠹ٶø´Ï´Ù.

 

ÀÌ ÆäÀÌÁöÀÇ Á¦ÀÏ À§·Î   

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