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°í¼Ó TTV ÃøÁ¤±â

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¸ðµ¨ CT200  °í¼Ó TTV ÃøÁ¤±â(»ý»ê¶óÀÎ Àû¿ë)

 

 System Specifications:        

1.ÃøÁ¤¹üÀ§

   –0 to 2 mm standard, greater range to 5mm optional.
2.Ãøº¡ Á¤¹Ðµµ¿Í ¼Óµµ
   –0.2um (1s)
3.Accuracy
   –0.2um or 0.05% of substrate thickness, whichever is greater.
4.Surface reflectivity requirement (rough or polished)
   –1% to 100%
5.µ¥ÀÌÅÍ È¹µæ ¼Óµµ
   –< 1 sec

 

6.ÃøÁ¤ »ùÇà »çÀÌÁî
   300mm standard, extension to < 600mm optional
7.ÃøÁ¤°¡´É ÀçÁú
   Metal, semiconductor, glass or equivalent optical material
8.ÃøÁ¤ Á¶°Ç
   Polished or rough for thickness measurement
9.Controller and interface
   PC with Windows  and 19¡± LDC monitor
   Integrated SW for graphical display, surface curvature calculation, and     film stress analysis
10.Power requirement
   90V ~ 240V, 300Watt

 

TTV,¾çÇ¥¸éÀÇ 3Â÷¿ø ÃøÁ¤¿Ü¿¡,

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            (Æòźµµ, Film StressÃøÁ¤±â)-2Â÷¿ø ÃøÁ¤

                             Ellipsometer(°í¼Ó ¹Ú¸· µÎ²²ÃøÁ¤±â) 

                                        ´Ù¾çÇÑ Å¸ÀÔÀÇ 2,3Â÷¿ø ÃøÁ¤±â       

 ¸ðÀç ÃøÁ¤ ¼¾¼­ °³³ä

Ç¥¸éÀÇ 3Â÷¿ø ÃøÁ¤/µÎ²²ÃøÁ¤/Ç¥¸éÀÇ Æòźµµ/Çʸ§ ÀÀ·Â °è»ê

 

Çѹ̻ê¾÷ 

ÀüÈ­ :  02 - 3411- 0173    ÆÑ½º :  02 - 3411 - 0178 

sales@gohanmi.com

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