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In-Situ Stress Monitor ¸ðµ¨ S-80 Ellipsometer(°í¼Ó ¹Ú¸· µÎ²²ÃøÁ¤±â,¹Ú¸·ÄÚÆÃÁõÂøÁ¦¾î¼¾¼½Ã½ºÅÛ)
TTV,¸ðÀçµÎ²²,ÈÚ.ºñƲ¸²,Æòźµµ,¹Ú¸·ÀÇ ÀÀ·Â,Ç¥¸é¾ç¸é3Â÷¿ø ÃøÁ¤±â
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¸ðµ¨ S-100, Ç¥¸é Æòźµµ(=Stress) ÃøÁ¤±â
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Ex-situ Measurment 1.Semiconductor ¸ðÀçÀÇ Æòźµµ¿Í ÈÚÀ² ÃøÁ¤ 2.Film Stress 3.Optical Surface Inspection
In-situ Measurment 1.Çʸ§ ÁõÂø °øÁ¤ °¨½Ã 2.¿Âµµ¿Í ÀÀ·ÂÀÇ »óÈ£ ÀÛ¿ë 3.Flat Panel Diplay °øÁ¤
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Ellipsometer(¹Ú¸·µÎ²²ÃøÁ¤±â)¿Í Curvature ÃøÁ¤±â¸¦ È¥ÇÕÇÑ ½Ã½ºÅÛ |
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ÀüÈ : 02 - 3411- 0173 ÆÑ½º : 02 - 3411 - 0178 2001-2005
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