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박막두께 측정기

Ellipsometer-Thin Film Thickness Measurement System           

 

모델 AcuSR200  Ellipsometer

 

 

 System Specifications:        

 

1.측정 두께 영역 :: 20 nm to 50 µm

2.측정시간:  초고속 2 ms minimum

3.Accuracy: better than 0.25% (comparing with ellipsometry 

                    results for Thermal Oxide sample by using the

                    same optical constants)

4.1-Sigma Dynamic Precision: 0.2 nm

1-Sigma Long-Term Repeatability: 0.5 n

 

                          박막의 실시간 증착공정제어 시스템

                                 평탄도,필름 Stress측정기-2차원측정

 

     TTV,모재두께,휨,비틀림,평탄도,박막의 응력,표면양면3차원 측정기  

                                다양한 타입의 2,3차원 측정기       

 

 

 Standard System Configuration 

  • Detector: CCD Array with 2048 pixels
  • Light Source: DC regulated Tungsten-Halogen
  • Light Delivery: Fiber Optics
  • Effective Wavelength range: 400 to 850 nm
  • Beam Size: 1 to 5mm (Optional down to 5 µm)
  • Stage: Black Anodized Aluminum Alloy
  • Communication: USB
  • Computer needed: P3 above
  • Power: 110– 240 VAC /50-60Hz, 1.5 A

 Options

  • Transmission Fixture for Transmission and Absorption Measurement.
  • Micro spot for measuring small area down to 5 µm size
  • Multiple Channel for simultaneously measurement at multiple locations Mapping uniformity over 200 or 300 mm wafer.

 Features                                                     

  • Easy to operate with Window based software
  • Advanced optics design for best system performance
  • CCD based array detector system to ensure fast measurement
  • Measure film thickness up to 5 layers
  • Allow to acquire reflection, transmission and absorption spectra in milliseconds
  • Capable to be used for real time or in-line thickness, refractive index monitoring
  • Advanced Software allows user to use either NK table, dispersion or
  • effective media approximation (EMA) for each individual film.
  • Upgradeable to MSP (Microspectrophotometer) system, SRM Mapping system,
  • Multiple channel system
  • Apply to many different type of substrates with different thickness

 Applications

 

   Photoresist / polyimide/Oxides/Nitrides

   Optical coatings, TiO2, SiO2, Ta2O5…..

   Semiconductor compounds  

   Functional films in MEMS/MOEMS

   Thin film transistors (TFT) stack

   Conductive oxide: Indium Tin Oxide

 

 

한미산업 

전화 :  02 - 3411- 0173    팩스 :  02 - 3411 - 0178 

sales@gohanmi.com

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sales@gohanmi.com