Home

용도에 따라 NEXIV

모델  VMR-H3030/ H3030 Z120

        VMR-  3020/   3020 Z120

        VMR-  6555/   6555 Z120

        VMR-10080/  10080 Z120

 

NIKON의 3차원 가공성/표면 측정 검사기

                   Model Nexiv

15:1( 또는 10:1)의 정교한 Zoom광학계와 고속의 Auto-focusing장치가 기본으로 장착된, 비접촉식 측정장비로 대면적의 샘플, 다수, 다량, 다점의시편에 대하여 신속-정확한 측정이 가능합니다.

 

적용: 1.  PCB Pattern의 측정 검사

         2. 반도체 패키지

         3. 모재의 Printing Mask

         4. Master instrument in a laboratory
         5. Dies and molds
         6. 정밀가공 기계 부속품

         7. Semiconductor packages
         8. Connectors
         9. Stampled Parts

       10.  Injection molded parts

       11. Shadow masks
       12.  FPD devices    ---> 2차원/3차원 이미지 분석

 

수직/ 수평 측정 정확도(Acccuracy)--- 모델에 따라

                                                        약 0.5micron~2micron

 

Applications
Semiconductor packages (multiple pieces)
Substrates
Printing masks for substrates
Stamped parts (multiple pieces)
Connectors (multiple pieces)
Injection molded parts (multiple pieces)

•650 x 550 mm stage stroke perfect for PCBs
•Automatic measurements of small parts by placing multiple pieces together on the stage
•Laser AF achieves high-accuracy measurements of bump heights
•Laser AF also enables measurements of height gaps and warping in workpieces
•Search function enables measurements of lands and holes of PCBs
•Search function also provides accurate measurements even when workpieces are not located properly on the stage
•Variety of illumination choices facilitate accurate edge detection even for vague geometries
•High-speed stage and high-speed image processing provide high throughput

Specifications

Stroke (XxYxZ)

650 x 550 x 150 mm (25.6 x 21.7 x 5.9 in.)

Minimum readout

0.1µm

Maximum workpiece weight

30kg (66.1 lb)

Measuring accuracy

 

 

U1X, U1Y

1.5 + 2.5L/1000µm (with a workpiece max. 30kg)

 

U2XY

2.5 + 2.5L/1000µm (with a workpiece max. 30kg)

Z-axis (L: Length in mm < W.D.)

1.5 + L/150µm

Camera

B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD

Working distance

50mm

Magnification vs field of view

 

 

Optical Head for Type 1

0.5 - 7.5X / 9.33 x 7 - 0.622 x 0.467 mm

 

Optical Head for Type 2

1 - 15X / 4.67 x 3.5 - 0.311 x 0.233 mm

 

Optical Head for Type 3

2 - 30X / 2.33 x 1.75 - 0.155 x 0.117 mm

Auto focus

TTL Laser AF and Vision AF

Illumination

Diascopic, episcopic, 8-segment LED ring illumination (inner ring / outer ring)

Power source

AC100-240V±10%, 50/60Hz

Power consumption

Max. 13A

Dimensions & weight

 

 

Main unit & table

1220 (W) x 1680 (D) 1750 (H) mm, approx. 600kg (48.0 x 66.1 x 68.9 in., 1322.8 lb.)

 

Controller

250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.)

Footprint

2400 (W) x 2000 (D) mm (94.5 x 78.7 in.)

Host Computer

Main unit

IBM PC/AT (Windows®2000)

Monitor

17-in. TFT color

 

모델별 중요사양

구분/모델

VMR-3020

VMR-6555

VMH-300N

VM-1000N

최대이송거리

300*200*150

650*550*150

300*300*155

1000*800*150

최소분해능

0.1㎛

0.1㎛

0.01㎛

0.1㎛

측정정밀도(X-Y축)

(2.5+L/250)

(2.5+L/250)

(0.9+-L/300)

(3.5+L/250)

측정정밀도(Z축)

(1.5+L/150)

(1.5+L/150)

(0.8+L/150)

(3+L/50)

최대허용중량

20Kg

30Kg

10Kg

40Kg

Zoom배율

0.5-7.5배(15:1)

0.5-7.5배(15:1)

0.75-7.5(10:1)

0.75-7.5(10:1)

총중량

200Kg

600Kg

600Kg

1500Kg

 

Measurement Examples

PCB

 

LCD

 

Molded part

 

Insertion pin of semiconductor package

 

Fine metal part and its 2D profile overlaid win a master shape

 

Result evaluation diagram of a metal part

                     상세한 사양과 정보를 원하시면 아래 연락처 한미산업으로 전화 주시기 바랍니다.

                                           수직분해능 100nano meter이하의 초정밀 3차원 측정기는 여기로--->

 

 한미산업 

전화 :  02 - 3411- 0173    팩스 :  02 - 3411 - 0178 

sales@gohanmi.com

2001-2005 Hanmi Industries Ltd. All rights reserved
sales@gohanmi.com